Invention Grant
US08278590B2 Apparatus for minimizing a heat affected zone during laser micro-machining 有权
用于在激光微加工期间最小化热影响区的装置

Apparatus for minimizing a heat affected zone during laser micro-machining
Abstract:
Embodiments of the present invention are directed to methods and systems for laser micro-machining, which may include dividing a long line illumination field into a plurality of individual fields, wherein each of the plurality of fields includes an aspect ratio of about 4:1 or greater, directing the plurality of individual fields onto at least one mask, wherein each individual field illuminates a corresponding area on the mask and translating the mask and/or workpiece relative to one another along a scan axis.
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