Invention Grant
- Patent Title: High-vacuum variable aperture mechanism and method of using same
- Patent Title (中): 高真空可变孔径机构及其使用方法
-
Application No.: US13006999Application Date: 2011-01-14
-
Publication No.: US08278623B2Publication Date: 2012-10-02
- Inventor: Mohammed Tahmassebpur
- Applicant: Mohammed Tahmassebpur
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Okamoto & Benedicto LLP
- Main IPC: G21K5/04
- IPC: G21K5/04 ; H01J37/09

Abstract:
A novel technique is disclosed for varying a size of an aperture within a vacuum chamber. A drive mechanism within the vacuum chamber is used to adjust a partial horizontal overlap between at least two blades, wherein a perimeter of the aperture opening is defined by edges of said blades. In one embodiment, a variable aperture mechanism includes first and second blades attached to a first support, and third and fourth blades attached to a second support. The first blade is spaced vertically above the second blade on the first support; a second support, and the fourth blade is spaced vertically above the third blade on the second support. There is a partial horizontal overlap between the first and third blades and between the fourth and second blades, and the aperture opening has a perimeter defined by edges of the four blades. Other embodiments are also disclosed.
Public/Granted literature
- US20120181444A1 High-Vacuum Variable Aperture Mechanism And Method Of Using Same Public/Granted day:2012-07-19
Information query