Invention Grant
- Patent Title: Sidewall photodetector
- Patent Title (中): 侧壁光电探测器
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Application No.: US12495665Application Date: 2009-06-30
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Publication No.: US08278741B2Publication Date: 2012-10-02
- Inventor: Michael T. Morse , Mario J. Paniccia , Olufemi I. Dosunmu
- Applicant: Michael T. Morse , Mario J. Paniccia , Olufemi I. Dosunmu
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L31/105
- IPC: H01L31/105

Abstract:
Sidewall photodetectors for integrated photonic devices and their method of manufacture. An embodiment includes a p-i-n film stack formed on a sidewall of a substrate semiconductor feature having sufficiently large area to accommodate the spot size of a multi-mode fiber. An embodiment includes a first sidewall photodetector coupled to a second sidewall photodetector by a waveguide, the first sidewall photodetector having an i-layer tuned to absorb a first wavelength of light incident to the first sidewall and pass a second wavelength of light to the second sidewall photodetector having an i-layer tuned to absorb the second wavelength.
Public/Granted literature
- US20100327381A1 SIDEWALL PHOTODETECTOR Public/Granted day:2010-12-30
Information query
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