Invention Grant
- Patent Title: Deforming mechanism, exposure apparatus, and device manufacturing method
- Patent Title (中): 变形机构,曝光装置和装置制造方法
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Application No.: US12481101Application Date: 2009-06-09
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Publication No.: US08279398B2Publication Date: 2012-10-02
- Inventor: Takeshi Sato
- Applicant: Takeshi Sato
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2008-153396 20080611; JP2009-135825 20090605
- Main IPC: G03B27/68
- IPC: G03B27/68 ; G03B27/52

Abstract:
A deforming mechanism for deforming a transmissive optical element comprises a rotation member configured to hold the optical element and to rotate around an axis parallel to a tangential line of a circumference of the optical element at a portion where the rotation member holds the optical element, so as to deform the optical element by the rotation, a torque generating unit configured to generate a torque to rotate the rotation member around the axis, a holding base, and an elastic member connecting the holding base to the torque generating unit.
Public/Granted literature
- US20090310107A1 DEFORMING MECHANISM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD Public/Granted day:2009-12-17
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