Invention Grant
US08279406B2 Article loading/unloading method and article loading/unloading device, exposure method and exposure apparatus, and method of manufacturing device 有权
物品装卸方式及物品装卸装置,曝光方法及曝光装置及其制造方法

  • Patent Title: Article loading/unloading method and article loading/unloading device, exposure method and exposure apparatus, and method of manufacturing device
  • Patent Title (中): 物品装卸方式及物品装卸装置,曝光方法及曝光装置及其制造方法
  • Application No.: US12083863
    Application Date: 2006-10-18
  • Publication No.: US08279406B2
    Publication Date: 2012-10-02
  • Inventor: Tara Sugihara
  • Applicant: Tara Sugihara
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Staas & Halsey LLP
  • Priority: JP2005-304602 20051019
  • International Application: PCT/JP2006/320763 WO 20061018
  • International Announcement: WO2007/046430 WO 20070426
  • Main IPC: G03B27/58
  • IPC: G03B27/58
Article loading/unloading method and article loading/unloading device, exposure method and exposure apparatus, and method of manufacturing device
Abstract:
A loading/unloading method to perform quickly exchanging an article to be loaded on a placing table. The method comprises: positioning the placing table, where article to be unloaded is placed, to a second position that is different from a first position; unloading the article that exists on the placing table; moving the placing table from the second position to the first position while the vertically moving member is positioned at a position lower than a lower surface of a loading member holding a next article and higher than the placing surface of the placing table; allowing a loading member holding the next article to wait over the first position before the placing table is positioned at the first position; and loading the next article onto the place table positioned at the first position after the placing table is moved to the first position.
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