Invention Grant
- Patent Title: Shape measurement apparatus and method
- Patent Title (中): 形状测量装置及方法
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Application No.: US12676245Application Date: 2008-08-19
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Publication No.: US08279448B2Publication Date: 2012-10-02
- Inventor: Jae-wan Kim , Tae-bong Eom , Jong-ahn Kim , Chu-shik Kang
- Applicant: Jae-wan Kim , Tae-bong Eom , Jong-ahn Kim , Chu-shik Kang
- Applicant Address: KR
- Assignee: Korea Research Institute of Standards and Science
- Current Assignee: Korea Research Institute of Standards and Science
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2007-0091213 20070907
- International Application: PCT/KR2008/004810 WO 20080819
- International Announcement: WO2009/031770 WO 20090312
- Main IPC: G01B11/02
- IPC: G01B11/02 ; H01S3/13

Abstract:
A shape measurement apparatus and method using a laser interferometer are disclosed. The shape measurement apparatus includes a plurality of laser devices, which generate beams, emit a beam of a specific frequency from among the generated beams, and output interference signals for detecting wavelengths of the generated beams, and a controller for detecting the wavelengths of the generated beams from the outputted interference signals, and controlling the laser devices on the basis of the detected wavelengths. The optical unit projects the beam of the laser device on a target object, and generates an interference pattern of the object. Several shutters are closed and opened. If the shutters are closed, they prevent the beam of each laser device to be projected on the optical unit. An image pickup unit captures the interference pattern.
Public/Granted literature
- US20100182614A1 SHAPE MEASUREMENT APPARATUS AND METHOD Public/Granted day:2010-07-22
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