Invention Grant
- Patent Title: Optical reflection element
- Patent Title (中): 光反射元件
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Application No.: US13265139Application Date: 2010-04-16
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Publication No.: US08279508B2Publication Date: 2012-10-02
- Inventor: Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
- Applicant: Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa, legal representative , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Panasonic Patent Center
- Priority: JP2009-102588 20090421
- International Application: PCT/JP2010/002772 WO 20100416
- International Announcement: WO2010/122751 WO 20101028
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.
Public/Granted literature
- US20120113492A1 OPTICAL REFLECTION ELEMENT Public/Granted day:2012-05-10
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