Invention Grant
- Patent Title: MEMS-scanning mirror device and method for manufacturing the same
- Patent Title (中): MEMS扫描镜装置及其制造方法
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Application No.: US12588804Application Date: 2009-10-28
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Publication No.: US08279509B2Publication Date: 2012-10-02
- Inventor: Hirotake Maruyama , Makoto Fujino , Hirokazu Tamura
- Applicant: Hirotake Maruyama , Makoto Fujino , Hirokazu Tamura
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Topcon
- Current Assignee: Kabushiki Kaisha Topcon
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2008-277897 20081029
- Main IPC: G02B26/08
- IPC: G02B26/08
Abstract:
An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.
Public/Granted literature
- US20100103492A1 MEMS-scanning mirror device and method for manufacturing the same Public/Granted day:2010-04-29
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