Invention Grant
- Patent Title: Composite transducer apparatus and system for processing a substrate and method of constructing the same
- Patent Title (中): 用于处理基板的复合传感器装置和系统及其构造方法
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Application No.: US12266543Application Date: 2008-11-06
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Publication No.: US08279712B2Publication Date: 2012-10-02
- Inventor: John A. Korbler , Richard Novak
- Applicant: John A. Korbler , Richard Novak
- Assignee: Akrion Systems LLC
- Current Assignee: Akrion Systems LLC
- Agency: The Belles Group, P.C.
- Main IPC: H04R17/00
- IPC: H04R17/00

Abstract:
A transducer, system and method of constructing the same that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is an apparatus for generating acoustic energy comprising: a plurality of pillars constructed of a piezoelectric material, the pillars arranged in a spaced-apart manner so that spaces exist between adjacent pillars; the pillars having a width and a height extending between a top surface and a bottom surface, wherein the height of the pillars is greater than the width of the pillars; and the spaces filled with a resilient material so as to form a composite assembly.
Public/Granted literature
- US20090231959A1 COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTURCTING THE SAME Public/Granted day:2009-09-17
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