Invention Grant
US08279712B2 Composite transducer apparatus and system for processing a substrate and method of constructing the same 有权
用于处理基板的复合传感器装置和系统及其构造方法

Composite transducer apparatus and system for processing a substrate and method of constructing the same
Abstract:
A transducer, system and method of constructing the same that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is an apparatus for generating acoustic energy comprising: a plurality of pillars constructed of a piezoelectric material, the pillars arranged in a spaced-apart manner so that spaces exist between adjacent pillars; the pillars having a width and a height extending between a top surface and a bottom surface, wherein the height of the pillars is greater than the width of the pillars; and the spaces filled with a resilient material so as to form a composite assembly.
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