Invention Grant
US08280131B2 Method and configuration for optically detecting an illuminated specimen 有权
用于光学检测被照射样品的方法和结构

Method and configuration for optically detecting an illuminated specimen
Abstract:
A configuration for the optical detection of a specimen, wherein the specimen or at least part of the specimen is scanned by means of linear illumination by scanning means, means for linear beam shaping of the illuminating light are provided, and the illuminating light has a preferably periodic structure in at least one spatial direction in that means for generating the structure are disposed in the illuminating beam path, light coming from the specimen is detected and images of the specimen are generated therefrom, at least one optical sectional image through the specimen and/or one image with increased resolution is/are calculated from the images, and means for generating the structure are disposed downstream of the scanning means in the direction of the illumination.
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