A semiconductor integrated circuit having an internal circuit group, which includes at least one internal circuit, includes a plurality of process monitoring circuits, each of which is disposed at a different location in the internal circuit group, each of the process monitoring circuits, which is operated in response to a power supply voltage, detecting monitoring data in the area where one of the process monitoring circuits is disposed, and a power supply voltage generating circuit generating the power supply voltage corresponding to the monitoring data, and supplying the power supply voltage to the internal circuit group.