Invention Grant
- Patent Title: Method to produce 3-D optical gyroscope my MEMS technology
- Patent Title (中): 生产三维光学陀螺仪的方法我的MEMS技术
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Application No.: US12352449Application Date: 2009-01-12
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Publication No.: US08281658B2Publication Date: 2012-10-09
- Inventor: Ting-Hau Wu , Chun-Ren Cheng , Jiou-Kang Lee , Jung-Huei Peng , Shang-Ying Tsai
- Applicant: Ting-Hau Wu , Chun-Ren Cheng , Jiou-Kang Lee , Jung-Huei Peng , Shang-Ying Tsai
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman Ham & Berner, LLP
- Main IPC: G01C19/00
- IPC: G01C19/00
Abstract:
A gyroscope sensor includes a gyro disk. A first light source is configured to provide a first light beam adjacent to a first edge of the gyro disk. A first light receiver is configured to receive the first light beam for sensing a vibration at a first direction of the gyro disk.
Public/Granted literature
- US20100175479A1 Method to produce 3-D optical gyroscope my MEMS technology Public/Granted day:2010-07-15
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