Invention Grant
- Patent Title: Method for simultaneously cutting a compound rod of semiconductor material into a multiplicity of wafers
- Patent Title (中): 同时将半导体材料的复合棒切割成多个晶片的方法
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Application No.: US12579127Application Date: 2009-10-14
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Publication No.: US08282761B2Publication Date: 2012-10-09
- Inventor: Alexander Rieger , Hans Oelkrug , Josef Schuster
- Applicant: Alexander Rieger , Hans Oelkrug , Josef Schuster
- Applicant Address: DE Munich
- Assignee: Siltronic AG
- Current Assignee: Siltronic AG
- Current Assignee Address: DE Munich
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102008051673 20081015
- Main IPC: B28D1/02
- IPC: B28D1/02 ; B32B38/04

Abstract:
A method for simultaneously cutting a compound rod of semiconductor material into a multiplicity of wafers. The method includes selecting a first workpiece and a second workpiece, each having two end surfaces; grinding at least one of the two end surfaces of each workpiece so as to create a ground end surface on each workpiece; cementing the ground end surface of the first workpiece to the ground end surface of second workpiece using a fastener so as to produce a compound rod piece having a longitudinal axis, wherein the fastener is disposed between the workpieces so as create a distance between the workpieces; fixing the compound rod piece in a longitudinal direction on a mounting plate; clamping the mounting plate with the compound rod piece in a wire saw; and cutting the compound rod piece perpendicularly to the longitudinal axis using the wire saw.
Public/Granted literature
- US20100089209A1 METHOD FOR SIMULTANEOUSLY CUTTING A COMPOUND ROD OF SEMICONDUCTOR MATERIAL INTO A MULTIPLICITY OF WAFERS Public/Granted day:2010-04-15
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