Invention Grant
- Patent Title: Dopant implanting method and doping apparatus
- Patent Title (中): 掺杂剂注入方法和掺杂装置
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Application No.: US12600885Application Date: 2008-05-23
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Publication No.: US08283241B2Publication Date: 2012-10-09
- Inventor: Yasuhito Narushima , Shinichi Kawazoe , Fukuo Ogawa , Toshimichi Kubota
- Applicant: Yasuhito Narushima , Shinichi Kawazoe , Fukuo Ogawa , Toshimichi Kubota
- Applicant Address: JP Omura-shi
- Assignee: Sumco Techxiv Corporation
- Current Assignee: Sumco Techxiv Corporation
- Current Assignee Address: JP Omura-shi
- Agency: Holtz, Holtz, Goodman & Chick, PC
- Priority: JP2007-146080 20070531
- International Application: PCT/JP2008/059508 WO 20080523
- International Announcement: WO2008/149686 WO 20081211
- Main IPC: H01L21/04
- IPC: H01L21/04

Abstract:
A dopant device includes: a dopant holder that holds Ge which is solid at normal temperature and liquefies the Ge near a surface of the semiconductor melt, the dopant holder including a communicating hole for delivering the liquefied Ge downwardly; a cover portion for covering the Ge held by the dopant holder; and a vent provided on the cover portion for communicating with the outside. A dopant injecting method is carried out using such a dopant device, the dopant injecting method including: loading Ge dopant in a solid state into the doping device; liquefying the solid Ge dopant loaded into the doping device while holding the doping device at a predetermined height from a surface of a semiconductor melt; and doping the semiconductor melt with the liquefied Ge that is flowed from the communicating hole.
Public/Granted literature
- US20100151667A1 DOPANT IMPLANTING METHOD AND DOPING APPARATUS Public/Granted day:2010-06-17
Information query
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