Invention Grant
- Patent Title: Inspection apparatus and inspection method
- Patent Title (中): 检验仪器和检验方法
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Application No.: US12679363Application Date: 2008-09-24
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Publication No.: US08285028B2Publication Date: 2012-10-09
- Inventor: Takashi Iwahashi , Toshihiko Tsujikawa , Atsushi Katayama
- Applicant: Takashi Iwahashi , Toshihiko Tsujikawa , Atsushi Katayama
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2007-256144 20070928
- International Application: PCT/JP2008/002623 WO 20080924
- International Announcement: WO2009/041016 WO 20090402
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G06K9/00 ; G06K9/36

Abstract:
Aims to provide an inspection apparatus which precisely detects an amount of misalignment of a component mounted on a panel through an adhesive which contains conductive particles. The inspection apparatus includes: an infrared-light illuminator (305) which is provided on a bottom-surface side of the panel and illuminates with light a panel recognition mark formed on the panel and a component recognition mark formed on the component; an IR camera (307) which is provided opposite to the illuminator (305) and captures images of the light-illuminated recognition marks; and an amount-of-misalignment calculation unit (446) which calculates, using the images captured by the camera (307), an amount of misalignment of the recognition marks as an amount of misalignment in mounting position, wherein the illuminator (305) emits light in an amount which causes halation, the light having a wavelength that allows the light to pass through the panel and the component but does not allow or does not easily allow the light to pass through the conductive particles.
Public/Granted literature
- US20100220918A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2010-09-02
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