Invention Grant
US08285028B2 Inspection apparatus and inspection method 失效
检验仪器和检验方法

Inspection apparatus and inspection method
Abstract:
Aims to provide an inspection apparatus which precisely detects an amount of misalignment of a component mounted on a panel through an adhesive which contains conductive particles. The inspection apparatus includes: an infrared-light illuminator (305) which is provided on a bottom-surface side of the panel and illuminates with light a panel recognition mark formed on the panel and a component recognition mark formed on the component; an IR camera (307) which is provided opposite to the illuminator (305) and captures images of the light-illuminated recognition marks; and an amount-of-misalignment calculation unit (446) which calculates, using the images captured by the camera (307), an amount of misalignment of the recognition marks as an amount of misalignment in mounting position, wherein the illuminator (305) emits light in an amount which causes halation, the light having a wavelength that allows the light to pass through the panel and the component but does not allow or does not easily allow the light to pass through the conductive particles.
Public/Granted literature
Information query
Patent Agency Ranking
0/0