Invention Grant
- Patent Title: High-molecular thin film, pattern medium and manufacturing method thereof
- Patent Title (中): 高分子薄膜,图案介质及其制造方法
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Application No.: US12644208Application Date: 2009-12-22
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Publication No.: US08287749B2Publication Date: 2012-10-16
- Inventor: Hirokazu Hasegawa , Mikihito Takenaka , Hiroshi Yoshida , Yasuhiko Tada
- Applicant: Hirokazu Hasegawa , Mikihito Takenaka , Hiroshi Yoshida , Yasuhiko Tada
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2008-325407 20081222
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B82Y40/00

Abstract:
The present invention provides a method of manufacturing a high-molecular thin film having a fine structure from a block-copolymer compound containing a block copolymer A as a main constituent composed of at least a block chain A1 and a block chain A2, and a block copolymer B as an accessory constituent composed of a block chain B1 miscible with a polymeric phase P1 mainly composed of the block chain A1 and a block chain B2 miscible with a polymeric phase P2 mainly composed of the block chain A2, and a substrate having a surface on which the block-copolymer compound is applied and on which a pattern member formed of a second material is discretely arranged to a surface part formed of a first material.
Public/Granted literature
- US20100159214A1 HIGH-MOLECULAR THIN FILM, PATTERN MEDIUM AND MANUFACTURING METHOD THEREOF Public/Granted day:2010-06-24
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