Invention Grant
US08288189B2 Package structure having MEMS element and fabrication method thereof
有权
具有MEMS元件的封装结构及其制造方法
- Patent Title: Package structure having MEMS element and fabrication method thereof
- Patent Title (中): 具有MEMS元件的封装结构及其制造方法
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Application No.: US12906401Application Date: 2010-10-18
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Publication No.: US08288189B2Publication Date: 2012-10-16
- Inventor: Chun-An Huang , Hsin-Yi Liao , Shih-Kuang Chiu
- Applicant: Chun-An Huang , Hsin-Yi Liao , Shih-Kuang Chiu
- Applicant Address: TW Taichung
- Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee Address: TW Taichung
- Agency: Edwards Wildman Palmer LLP
- Agent Peter F. Corless; Steven M. Jensen
- Priority: TW99130155A 20100907
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/84

Abstract:
A package structure having an MEMS element includes: a packaging substrate having first and second wiring layers on two surfaces thereof and a chip embedded therein; a first dielectric layer disposed on the packaging substrate and the chip; a third wiring layer disposed on the first dielectric layer; a second dielectric layer disposed on the first dielectric layer and the third wiring layer and having a recessed portion; a lid disposed in the recessed portion and on the top surface of the second dielectric layer around the periphery of the recessed portion, wherein the portion of the lid on the top surface of the second dielectric layer is formed into a lid frame on which an adhering material is disposed to allow a substrate having an MEMS element to be attached to the packaging substrate with the MEMS element corresponding in position to the recessed portion, thereby providing a package structure of reduced size and costs with better electrical properties.
Public/Granted literature
- US20120056279A1 PACKAGE STRUCTURE HAVING MEMS ELEMENT AND FABRICATION METHOD THEREOF Public/Granted day:2012-03-08
Information query
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