Invention Grant
- Patent Title: Handle wafer having viewing windows
- Patent Title (中): 处理具有观察窗的晶片
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Application No.: US12827171Application Date: 2010-06-30
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Publication No.: US08288841B2Publication Date: 2012-10-16
- Inventor: Jean-Charles Souriau , Stéphane Caplet
- Applicant: Jean-Charles Souriau , Stéphane Caplet
- Applicant Address: FR Paris
- Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0954779 20090709
- Main IPC: H01L29/00
- IPC: H01L29/00
Abstract:
A handle wafer for microelectronic functional wafers, including at least one cavity through the thickness of the wafer, this cavity including a viewing window in solid or solidified material.
Public/Granted literature
- US20110006400A1 HANDLE WAFER HAVING VIEWING WINDOWS Public/Granted day:2011-01-13
Information query
IPC分类:
