Invention Grant
- Patent Title: Microelectromechanical resonant structure having improved electrical characteristics
- Patent Title (中): 具有改善的电特性的微机电谐振结构
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Application No.: US12953930Application Date: 2010-11-24
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Publication No.: US08289092B2Publication Date: 2012-10-16
- Inventor: Anna Pomarico , Pasquale Flora , Annarita Morea , Giuditta Roselli
- Applicant: Anna Pomarico , Pasquale Flora , Annarita Morea , Giuditta Roselli
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2009A0929 20091127
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H01L41/02

Abstract:
The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface.
Public/Granted literature
- US20110128083A1 MICROELECTROMECHANICAL RESONANT STRUCTURE HAVING IMPROVED ELECTRICAL CHARACTERISTICS Public/Granted day:2011-06-02
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