Invention Grant
- Patent Title: Copper alloy via bottom liner
- Patent Title (中): 铜合金通过底衬
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Application No.: US13116622Application Date: 2011-05-26
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Publication No.: US08294270B2Publication Date: 2012-10-23
- Inventor: Daniel C. Edelstein , Edward C. Cooney, III , John A. Fitzsimmons , Jeffrey P. Gambino , Anthony K. Stamper
- Applicant: Daniel C. Edelstein , Edward C. Cooney, III , John A. Fitzsimmons , Jeffrey P. Gambino , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Whitham, Curtis, Christofferson & Cook, P.C.
- Agent Ian D. MacKinnon
- Main IPC: H01L23/52
- IPC: H01L23/52

Abstract:
Improved mechanical and adhesive strength and resistance to breakage of copper integrated circuit interconnections is obtained by forming a copper alloy in a copper via/wiring connection in an integrated circuit while minimizing adverse electrical effects of the alloy by confining the alloy to an interfacial region of said via/wiring connection and not elsewhere by a barrier which reduces or substantially eliminates the thickness of alloy in the conduction path. The alloy location and composition are further stabilized by reaction of all available alloying material with copper, copper alloys or other metals and their alloys.
Public/Granted literature
- US20110227225A1 COPPER ALLOY VIA BOTTOM LINER Public/Granted day:2011-09-22
Information query
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