Invention Grant
- Patent Title: Inspection apparatus having alignment mechanism
- Patent Title (中): 具有对准机构的检查装置
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Application No.: US12053354Application Date: 2008-03-21
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Publication No.: US08294480B2Publication Date: 2012-10-23
- Inventor: Masaru Suzuki , Yasuhito Yamamoto
- Applicant: Masaru Suzuki , Yasuhito Yamamoto
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-077920 20070323
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
An inspection apparatus includes a mounting table movable in X and Y directions and an alignment mechanism which performs an alignment of a target object placed on the mounting table. Further, the alignment mechanism includes an image pickup device which is movable in either one of the X and Y directions and is capable of being stopped at a desired position and a controller for performing a preliminary alignment of the target object by moving the image pickup device and the mounting table in respectively movable directions.
Public/Granted literature
- US20080231301A1 INSPECTION APPARATUS Public/Granted day:2008-09-25
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