Invention Grant
US08294539B2 Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing 有权
微电机械开关梁结构,最小化波束失真和构造方法

Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
Abstract:
Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.
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