Invention Grant
- Patent Title: MEMS device with integral packaging
- Patent Title (中): 集成封装的MEMS器件
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Application No.: US13368275Application Date: 2012-02-07
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Publication No.: US08295027B2Publication Date: 2012-10-23
- Inventor: Michael Bennett Cohn , Ji-Hai Xu
- Applicant: Michael Bennett Cohn , Ji-Hai Xu
- Applicant Address: US CA Richmond
- Assignee: MicroAssembly Technologies, Inc.
- Current Assignee: MicroAssembly Technologies, Inc.
- Current Assignee Address: US CA Richmond
- Agency: Fenwick & West LLP
- Main IPC: H01G5/00
- IPC: H01G5/00 ; H01G5/16

Abstract:
A MEMS device and method of making same is disclosed. In one embodiment, a micro-switch includes a base assembly comprising a movable structure bearing a contact pad. The base assembly is wafer-scale bonded to a lid assembly comprising an activator and a signal path. The movable structure moves within a sealed cavity formed during the bonding process. The signal path includes an input line and an output line separated by a gap, which prevents signals from propagating through the micro-switch when the switch is deactivated. In operation, a signal is launched into the signal path. When the micro-switch is activated, a force is established by the actuator, which pulls a portion of the movable structure upwards towards the gap in the signal path, until the contact pad bridges the gap between the input line and output line, allowing the signal to propagate through the micro-switch.
Public/Granted literature
- US20120193754A1 MEMS DEVICE WITH INTEGRAL PACKAGING Public/Granted day:2012-08-02
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