Invention Grant
- Patent Title: Method and system for managing light source operation
- Patent Title (中): 管理光源操作的方法和系统
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Application No.: US12730506Application Date: 2010-03-24
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Publication No.: US08295316B2Publication Date: 2012-10-23
- Inventor: Robert P. Akins , Richard L. Sandstrom , Daniel J. W. Brown , Matthew R. Graham , Kevin W. Zhang , Patrick L. Nelissen
- Applicant: Robert P. Akins , Richard L. Sandstrom , Daniel J. W. Brown , Matthew R. Graham , Kevin W. Zhang , Patrick L. Nelissen
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Gard & Kaslow LLP
- Main IPC: H01S3/13
- IPC: H01S3/13

Abstract:
A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
Public/Granted literature
- US20110235663A1 Method and System for Managing Light Source Operation Public/Granted day:2011-09-29
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