Invention Grant
US08299935B2 Test apparatus and test method 有权
试验装置及试验方法

Test apparatus and test method
Abstract:
A test apparatus comprising a plurality of test units that test a device under test; a plurality of housing sections that respectively house the test units therein; a plurality of opening/closing sections that are disposed respectively in the housing sections and that expose the test units to the outside or isolate the test units from the outside; and a control section that independently controls whether each of the opening/closing sections is allowed to be opened. The control section may allow test units that are not supplied with power to be exposed to the outside. For at least one of (i) a period during which one of the test units is performing a predetermined operation, (ii) a predetermined period before the period during which one of the test units is performing the predetermined operation, and (iii) a predetermined period after the period during which one of the test units is performing the predetermined operation, the control section may prohibit other test units from being exposed to the outside.
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