Invention Grant
US08300290B2 Piezoelectric mirror device, optical equipment incorporating the same, and piezoelectric mirror device fabrication process 有权
压电镜装置,结合其的光学装置和压电反射镜装置制造工艺

Piezoelectric mirror device, optical equipment incorporating the same, and piezoelectric mirror device fabrication process
Abstract:
A piezoelectric mirror device (11) comprises a frame portion (12) having a centrally located opening (13), a mirror portion (14) positioned at the opening (13), a pair of mirror support portions (15) adapted to support the mirror portion (14) rotatably relative the frame portion (12) and a pair of drive portions (16) that is a multilayer structure of lower electrodes (17), piezoelectric element (18) and an upper electrode (19). The mirror support portions (15) are formed of a material having a Young's modulus of up to 160 GPa, and the frame portion (12) includes a cutout (13a) at a part of a site wherein there are the drive portions (16) positioned. The cutout (13a) is in contact with the opening (13).
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