Invention Grant
- Patent Title: Piezoelectric mirror device, optical equipment incorporating the same, and piezoelectric mirror device fabrication process
- Patent Title (中): 压电镜装置,结合其的光学装置和压电反射镜装置制造工艺
-
Application No.: US12306608Application Date: 2008-06-04
-
Publication No.: US08300290B2Publication Date: 2012-10-30
- Inventor: Shinji Maekawa
- Applicant: Shinji Maekawa
- Applicant Address: JP Tokyo
- Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-152399 20070608; JP2008-105650 20080415
- International Application: PCT/JP2008/060630 WO 20080604
- International Announcement: WO2008/150016 WO 20081211
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B26/12

Abstract:
A piezoelectric mirror device (11) comprises a frame portion (12) having a centrally located opening (13), a mirror portion (14) positioned at the opening (13), a pair of mirror support portions (15) adapted to support the mirror portion (14) rotatably relative the frame portion (12) and a pair of drive portions (16) that is a multilayer structure of lower electrodes (17), piezoelectric element (18) and an upper electrode (19). The mirror support portions (15) are formed of a material having a Young's modulus of up to 160 GPa, and the frame portion (12) includes a cutout (13a) at a part of a site wherein there are the drive portions (16) positioned. The cutout (13a) is in contact with the opening (13).
Public/Granted literature
Information query