Invention Grant
- Patent Title: Magnetoresistance sensors pinned by an etch induced magnetic anisotropy
- Patent Title (中): 磁阻传感器被蚀刻引起的磁各向异性
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Application No.: US13020430Application Date: 2011-02-03
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Publication No.: US08300367B2Publication Date: 2012-10-30
- Inventor: James M. Freitag , Mustafa M. Pinarbasi
- Applicant: James M. Freitag , Mustafa M. Pinarbasi
- Applicant Address: NL Amsterdam
- Assignee: HGST Netherlands, B.V.
- Current Assignee: HGST Netherlands, B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Duft Bornsen & Fishman, LLP
- Main IPC: G11B5/127
- IPC: G11B5/127

Abstract:
Magnetoresistance sensors with magnetic pinned layers that are pinned by anisotropic etch induced magnetic anisotropies and methods for fabricating the magnetoresistance sensors are provided. The method comprises forming a seed layer structure. The seed layer is etched to form an anisotropic etch along a top surface of the seed layer. A magnetic pinned layer is formed on the top surface of the seed layer structure. The anisotropic etch on the top surface of the seed layer structure induces a magnetic anisotropy in the magnetic pinned layer, which pins the magnetization of the magnetic pinned layer structure.
Public/Granted literature
- US20110122534A1 MAGNETORESISTANCE SENSORS PINNED BY AN ETCH INDUCED MAGNETIC ANISOTROPY Public/Granted day:2011-05-26
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