Invention Grant
- Patent Title: Micro-bump forming apparatus
- Patent Title (中): 微凸块形成装置
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Application No.: US13111252Application Date: 2011-05-19
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Publication No.: US08302838B2Publication Date: 2012-11-06
- Inventor: Noriaki Mukai , Isao Abe
- Applicant: Noriaki Mukai , Isao Abe
- Applicant Address: JP Tokyo
- Assignee: Hitachi Plant Technologies, Ltd.
- Current Assignee: Hitachi Plant Technologies, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2010-118426 20100524
- Main IPC: B23K3/00
- IPC: B23K3/00

Abstract:
A micro-bump forming apparatus includes: a film attachment mechanism that attaches a film on a surface of a substrate; exposure and developing mechanisms that provide openings in the film on electrodes formed on the substrate; a solder ball loading mechanism that loads solder balls into the openings, a flux printing mechanism that prints flux through the openings loaded with the solder balls; a reflow part that heats the solder balls to form solder bumps; and a film detachment mechanism that detaches the film from the surface of the substrate. After a loading head loads the solder balls into the openings of the film, a controller of the solder ball loading mechanism allows a line sensor to operate to check a loading state of the solder balls, and determines, based on the check result, whether to reload the solder balls.
Public/Granted literature
- US20110284618A1 MICRO-BUMP FORMING APPARATUS Public/Granted day:2011-11-24
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