Invention Grant
- Patent Title: Roll-to-roll atomic layer deposition method and system
- Patent Title (中): 卷对卷原子层沉积方法和系统
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Application No.: US10782233Application Date: 2004-02-19
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Publication No.: US08304019B1Publication Date: 2012-11-06
- Inventor: Karl Pichler
- Applicant: Karl Pichler
- Applicant Address: US CA San Jose
- Assignee: Nanosolar Inc.
- Current Assignee: Nanosolar Inc.
- Current Assignee Address: US CA San Jose
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
Atomic layer deposition in a roll-to-roll manufacturing environment is disclosed. At least a portion of a substrate from a first roll is disposed in a chamber. A first atomic layer deposition (ALD) half reaction is performed on the portion of the substrate while the portion is within the chamber. A subsequent ALD half reaction may be performed on the same portion of the substrate to form a layer of material. Multiple ALD sequences may be performed by passing the substrate through a sequence of ALD reaction chambers or by passing the substrate through one or more ALD reaction chambers in a continuous loop.
Information query
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