Invention Grant
US08304019B1 Roll-to-roll atomic layer deposition method and system 失效
卷对卷原子层沉积方法和系统

  • Patent Title: Roll-to-roll atomic layer deposition method and system
  • Patent Title (中): 卷对卷原子层沉积方法和系统
  • Application No.: US10782233
    Application Date: 2004-02-19
  • Publication No.: US08304019B1
    Publication Date: 2012-11-06
  • Inventor: Karl Pichler
  • Applicant: Karl Pichler
  • Applicant Address: US CA San Jose
  • Assignee: Nanosolar Inc.
  • Current Assignee: Nanosolar Inc.
  • Current Assignee Address: US CA San Jose
  • Agency: JDI Patent
  • Agent Joshua D. Isenberg
  • Main IPC: C23C16/00
  • IPC: C23C16/00
Roll-to-roll atomic layer deposition method and system
Abstract:
Atomic layer deposition in a roll-to-roll manufacturing environment is disclosed. At least a portion of a substrate from a first roll is disposed in a chamber. A first atomic layer deposition (ALD) half reaction is performed on the portion of the substrate while the portion is within the chamber. A subsequent ALD half reaction may be performed on the same portion of the substrate to form a layer of material. Multiple ALD sequences may be performed by passing the substrate through a sequence of ALD reaction chambers or by passing the substrate through one or more ALD reaction chambers in a continuous loop.
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