Invention Grant
- Patent Title: Semiconductor device and method of producing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12546383Application Date: 2009-08-24
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Publication No.: US08304910B2Publication Date: 2012-11-06
- Inventor: Haruhiko Koyama
- Applicant: Haruhiko Koyama
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-222197 20080829
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A lack of exposure margin is avoided in a region, where an interconnection is required in a direction different from that of an interconnection of a region where an exposure condition is optimized. A semiconductor device According to an aspect of the invention includes a semiconductor substrate 201; an interlayer insulating film 202 that is formed on the semiconductor substrate 201; a plurality of first interconnections 1, 1, . . . that are formed in a first region on the interlayer insulating film 202 while complying with a first design rule, the first interconnections running along a specific direction; a plurality of second interconnections 2, 2, . . . that are formed in a second region on the interlayer insulating film 202 while complying with a second design rule identical to the first design rule, the second interconnections running along the same direction with that of the first interconnections 1, 1, . . . ; and a connection member 3 that is formed in the interlayer insulating film 202, the connection member forming a desired interconnection pattern by electrically connecting at least the two second interconnections 2 and 2 that should become an identical potential.
Public/Granted literature
- US20100052182A1 SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME Public/Granted day:2010-03-04
Information query
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