Invention Grant
- Patent Title: Apparatus and method for pattern inspection
- Patent Title (中): 模式检查的装置和方法
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Application No.: US12551908Application Date: 2009-09-01
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Publication No.: US08306310B2Publication Date: 2012-11-06
- Inventor: Shuichi Tamamushi
- Applicant: Shuichi Tamamushi
- Applicant Address: JP Numazu-shi
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Numazu-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-236964 20080916; JP2009-067661 20090319
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G01N21/00

Abstract:
A pattern inspection apparatus includes a light source, a stage configured to mount thereon a substrate with a pattern formed thereon, a first laser measuring unit configured to measure a position of the stage by using a laser beam, a sensor configured to capture a pattern image obtained from the pattern, formed on the substrate, irradiated by light from the light source, an optical system configured to focus the pattern image on the sensor, a second laser measuring unit configured to measure a position of the optical system by using a laser beam, a correction unit configured to correct a captured pattern image by using a difference between the position of the stage and the position of the optical system, and an inspection unit configured to inspect whether there is a defect of the pattern by using a corrected pattern image.
Public/Granted literature
- US20100067778A1 APPARATUS AND METHOD FOR PATTERN INSPECTION Public/Granted day:2010-03-18
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