Invention Grant
- Patent Title: Manufacturing method of three-dimensional structure
- Patent Title (中): 三维结构制造方法
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Application No.: US12478298Application Date: 2009-06-04
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Publication No.: US08309176B2Publication Date: 2012-11-13
- Inventor: Taisuke Isano , Kosuke Asano , Yasushi Kaneda
- Applicant: Taisuke Isano , Kosuke Asano , Yasushi Kaneda
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc. IP Division
- Priority: JP2008-150482 20080609
- Main IPC: B32B38/00
- IPC: B32B38/00 ; B32B38/10 ; B32B37/00 ; B32B37/02 ; B05D1/32 ; B05D1/36 ; B05D1/38 ; B05D5/00

Abstract:
A method for manufacturing a three-dimensional structure includes forming a first structure having a relief pattern on a substrate, forming a sacrifice layer on the first structure such that the sacrifice layer can be filled in a concave part of the first structure and the sacrifice layer can cover a surface of a convex part of the first structure on a side opposite to the substrate, forming a second structure having a relief pattern on the sacrifice layer, and a fourth step of removing the sacrifice layer from between the first structure and the second structure, and thereby bringing the second structure into contact with the surface of the first structure.
Public/Granted literature
- US20090304928A1 MANUFACTURING METHOD OF THREE-DIMENSIONAL STRUCTURE Public/Granted day:2009-12-10
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