Invention Grant
- Patent Title: Ion deflector for two-dimensional control of ion beam cross sectional spread
- Patent Title (中): 离子导流板二维控制离子束横截面扩展
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Application No.: US12708886Application Date: 2010-02-19
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Publication No.: US08309936B2Publication Date: 2012-11-13
- Inventor: Holger Kreckel , Hjalmar Bruhns , Daniel Wolf Savin
- Applicant: Holger Kreckel , Hjalmar Bruhns , Daniel Wolf Savin
- Applicant Address: US NY New York City
- Assignee: Trustees of Columbia University in the City of New York
- Current Assignee: Trustees of Columbia University in the City of New York
- Current Assignee Address: US NY New York City
- Agency: Evans & Molinelli PLLC
- Agent Eugene J. Molinelli
- Main IPC: H01J3/34
- IPC: H01J3/34
Abstract:
An ion deflector, for deflecting a beam of charged particles along an arc in a deflection plane, includes a pair of non-spherical deflection electrodes adapted for being charged with different voltages. The pair of deflection electrodes are configured to control, in both the deflection plane and in a direction perpendicular to the deflection plane, a cross sectional spread of charged particles in a deflected beam that exits the ion deflector. In some embodiments, a first electrode has a first height perpendicular to the deflection plane and a second electrode has a different second height.
Public/Granted literature
- US20100219352A1 ION DEFLECTOR FOR TWO-DIMENSIONAL CONTROL OF ION BEAM CROSS SECTIONAL SPREAD Public/Granted day:2010-09-02
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