Invention Grant
US08309951B2 Test structure for determining gate-to-body tunneling current in a floating body FET
有权
用于确定浮体FET中的门到体隧道电流的测试结构
- Patent Title: Test structure for determining gate-to-body tunneling current in a floating body FET
- Patent Title (中): 用于确定浮体FET中的门到体隧道电流的测试结构
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Application No.: US11879937Application Date: 2007-07-18
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Publication No.: US08309951B2Publication Date: 2012-11-13
- Inventor: Sushant S. Suryagandh , Ciby Thomas Thuruthiyil
- Applicant: Sushant S. Suryagandh , Ciby Thomas Thuruthiyil
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Farjami & Farjami LLP
- Main IPC: H01L23/58
- IPC: H01L23/58

Abstract:
In one disclosed embodiment, the present test structure for determining gate-to-body current in a floating body FET includes a floating body FET situated over a semiconductor layer, where the floating body FET includes a first gate and first and second source/drain regions. The floating body test structure further includes a second gate and a first contact situated over the first source/drain region. A gate-to-channel current measured between the second gate and the first contact is utilized to determine the gate-to-body tunneling current. The gate-to-body tunneling current can be determined by subtracting the gate-to-channel current from twice a source/drain current of the floating body FET. The test structure may also include a second contact situated on a doped region in the semiconductor layer, where a diode current flow through the doped region determines a body voltage for the floating body FET.
Public/Granted literature
- US20090020754A1 Test structure for determining gate-to-body tunneling current in a floating body FET Public/Granted day:2009-01-22
Information query
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