Invention Grant
- Patent Title: Switching element including carbon nanotubes and method for manufacturing the same
- Patent Title (中): 包括碳纳米管的开关元件及其制造方法
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Application No.: US12676218Application Date: 2008-09-08
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Publication No.: US08309992B2Publication Date: 2012-11-13
- Inventor: Satoru Toguchi , Hideaki Numata , Hiroyuki Endoh
- Applicant: Satoru Toguchi , Hideaki Numata , Hiroyuki Endoh
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2007-232598 20070907
- International Application: PCT/JP2008/066174 WO 20080908
- International Announcement: WO2009/031681 WO 20090312
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A problem of a switching element using for the active layer a carbon nanotube (CNT) dispersion film that can be manufactured at low temperature has been that sufficient electrical contact and thermal conductivity between the CNTs and the source and drain electrode surfaces are not obtained. The switching element of the present invention has a structure in which a mixed layer of carbon nanotubes and a metal material, and a metal layer of the metal material are laminated in this order on source and drain electrodes, and thereby, the CNT-dispersed film and the electrode surfaces can be in firm electrical, mechanical, and thermal contact with each other. Thus, a switching element exhibiting good and stable transistor characteristics is obtained with a low-temperature, convenient, and low-cost process.
Public/Granted literature
- US20100163858A1 SWITCHING ELEMENT AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2010-07-01
Information query
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