Invention Grant
- Patent Title: Confocal scanning microscope
- Patent Title (中): 共焦扫描显微镜
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Application No.: US12632007Application Date: 2009-12-07
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Publication No.: US08310753B2Publication Date: 2012-11-13
- Inventor: Fumio Suzuki , Naoshi Aikawa , Kotaro Yamaguchi
- Applicant: Fumio Suzuki , Naoshi Aikawa , Kotaro Yamaguchi
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2007-187816 20070719; JP2007-296678 20071115
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B27/14

Abstract:
A confocal scanning microscope including: an objective system (second objective lens 23 and objective lens 24) illuminating a sample SA with illumination light; a scanning mechanism 31 scanning the sample SA to obtain an intensity signal; and a scanning optical system 32 provided between the scanning mechanism and the objective system. The scanning optical system composed of, in order from the scanning mechanism side, a first positive lens group G1, a second negative lens group G2, and a third positive lens group G3. The third lens group has two chromatic aberration correction portions each formed by a positive lens and a negative lens or negative lens and positive lens. Glass materials are selected such that one performs chromatization and the other performs achromatization, thereby providing a confocal scanning microscope capable of correcting lateral chromatic aberration generated in the objective system in the specific wavelength region by the scanning optical system.
Public/Granted literature
- US20100079858A1 CONFOCAL SCANNING MICROSCOPE Public/Granted day:2010-04-01
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