Invention Grant
US08310807B2 Capacitors having dielectric regions that include multiple metal oxide-comprising materials
失效
具有包括多个含金属氧化物的材料的电介质区域的电容器
- Patent Title: Capacitors having dielectric regions that include multiple metal oxide-comprising materials
- Patent Title (中): 具有包括多个含金属氧化物的材料的电介质区域的电容器
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Application No.: US12483474Application Date: 2009-06-12
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Publication No.: US08310807B2Publication Date: 2012-11-13
- Inventor: Rishikesh Krishnan , John Smythe , Vishwanath Bhat , Noel Rocklein , Bhaskar Srinivasan , Jeff Hull , Chris Carlson
- Applicant: Rishikesh Krishnan , John Smythe , Vishwanath Bhat , Noel Rocklein , Bhaskar Srinivasan , Jeff Hull , Chris Carlson
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01G4/06
- IPC: H01G4/06 ; H01G4/20 ; H01G4/10

Abstract:
Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10−7 amps/cm2 at from −1.1V to +1.1V.
Public/Granted literature
- US20100315760A1 Capacitors Having Dielectric Regions That Include Multiple Metal Oxide-Comprising Materials Public/Granted day:2010-12-16
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