Invention Grant
US08313960B1 Magnetic tunnel junction (MTJ) formation using multiple etching processes
有权
使用多次蚀刻工艺形成磁隧道结(MTJ)
- Patent Title: Magnetic tunnel junction (MTJ) formation using multiple etching processes
- Patent Title (中): 使用多次蚀刻工艺形成磁隧道结(MTJ)
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Application No.: US13371380Application Date: 2012-02-10
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Publication No.: US08313960B1Publication Date: 2012-11-20
- Inventor: Ebrahim Abedifard , Parviz Keshtbod
- Applicant: Ebrahim Abedifard , Parviz Keshtbod
- Applicant Address: US CA Fremont
- Assignee: Avalanche Technology, Inc.
- Current Assignee: Avalanche Technology, Inc.
- Current Assignee Address: US CA Fremont
- Agency: IPxLaw Group LLP
- Agent Maryam Imam
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing a magnetic memory element includes the steps of forming a permanent magnetic layer on top a bottom electrode, forming a pinning layer on top the permanent magnetic layer, forming a magnetic tunnel junction (MTJ) including a barrier layer on top of the pinning layer, forming a top electrode on top of the MTJ, forming a hard mask on top of the top electrode, and using the hard mask to perform a series of etching processes to reduce the width of the MTJ and the top electrode to substantially a desired width, where one of these etching processes is stopped when a predetermined material in the pinning layer is detected thereby avoiding deposition of metal onto the barrier layer of the etching process thereby preventing shorting.
Public/Granted literature
- US20120282711A1 MAGNETIC TUNNEL JUNCTION (MTJ) FORMATION USING MULTIPLE ETCHING PROCESSES Public/Granted day:2012-11-08
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