Invention Grant
- Patent Title: Non-volatile semiconductor storage device
- Patent Title (中): 非易失性半导体存储器件
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Application No.: US13156727Application Date: 2011-06-09
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Publication No.: US08314455B2Publication Date: 2012-11-20
- Inventor: Yasuhiro Shiino , Atsuhiro Sato , Takeshi Kamigaichi , Fumitaka Arai
- Applicant: Yasuhiro Shiino , Atsuhiro Sato , Takeshi Kamigaichi , Fumitaka Arai
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-067747 20080317
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
A non-volatile semiconductor storage device includes: a memory cell area in which a plurality of electrically rewritable memory cells are formed; and a peripheral circuit area in which transistors that configure peripheral circuits to control the memory cells are formed. The memory cell area has formed therein: a semiconductor layer formed to extend in a vertical direction to a semiconductor substrate; a plurality of conductive layers extending in a parallel direction to, and laminated in a vertical direction to the semiconductor substrate; and a property-varying layer formed between the semiconductor layer and the conductive layers and having properties varying depending on a voltage applied to the conductive layers. The peripheral circuit area has formed therein a plurality of dummy wiring layers that are formed on the same plane as each of the plurality of conductive layers and that are electrically separated from the conductive layers.
Public/Granted literature
- US20110233652A1 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2011-09-29
Information query
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