Invention Grant
- Patent Title: Multi-channel radio frequency generator
- Patent Title (中): 多声道射频发生器
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Application No.: US12760771Application Date: 2010-04-15
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Publication No.: US08314561B2Publication Date: 2012-11-20
- Inventor: Larry J. Fisk , Adrian Sapio
- Applicant: Larry J. Fisk , Adrian Sapio
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H05B31/26
- IPC: H05B31/26 ; H01J7/24

Abstract:
A multi-channel radio frequency (RF) generator module includes N power amplifiers, M drivers, a power supply module, and a control module. The N power amplifiers generate N RF outputs, respectively. The M drivers drive the N power amplifiers based on M driver control signals, respectively. The power supply module receives alternating current (AC) input power and applies L rail voltages to the N power amplifiers based on L rail voltage setpoints, respectively. The control module sets the L rail voltage setpoints and the M driver control signals. N is an integer greater than one, L and M are integers greater than zero, and M and L are less than or equal to N.
Public/Granted literature
- US20110241773A1 Multi-Channel Radio Frequency Generator Public/Granted day:2011-10-06
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