Invention Grant
US08314666B2 Resonator, elastic wave transmission element and fabrication method thereof 有权
谐振器,弹性波传播元件及其制造方法

Resonator, elastic wave transmission element and fabrication method thereof
Abstract:
A resonator, an elastic wave transmission element and a method for fabricating the transmission element are provided. The elastic wave transmission element has a first side and a second side. The elastic wave transmission element includes a plurality of structures sequentially arranged along a direction from the first side toward the second side. Each of the structures has a different defect which is different to each other. The impedance of the structures decreases gradually along the direction. As such, the elastic wave transmission element has an impedance match function.
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