Invention Grant
- Patent Title: Layout design for a high power, GaN-based FET
- Patent Title (中): 高功率GaN基FET的布局设计
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Application No.: US12821492Application Date: 2010-06-23
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Publication No.: US08319256B2Publication Date: 2012-11-27
- Inventor: Linlin Liu , Milan Pophristic , Boris Peres
- Applicant: Linlin Liu , Milan Pophristic , Boris Peres
- Applicant Address: US CA San Jose
- Assignee: Power Integrations, Inc.
- Current Assignee: Power Integrations, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Mayer & Williams PC
- Agent Stuart H. Mayer
- Main IPC: H01L31/072
- IPC: H01L31/072 ; H01L31/109 ; H01L31/0328 ; H01L31/0336

Abstract:
A FET includes a substrate, a buffer layer disposed on the substrate, a channel layer disposed over the buffer layer and a barrier layer disposed over the channel layer. Source, gate and drain electrodes are located over the barrier layer and extend in a longitudinal direction thereon. A portion of the channel and barrier layers define a mesa extending in the longitudinal direction and the source and drain electrodes extend beyond an edge of the mesa. The gate electrodes extend along an edge sidewall of the mesa. A conductive source interconnect is disposed over the buffer layer and have a first end electrically connected to the source electrode. A first dielectric layer is disposed over the buffer layer and over the source interconnect. A gate via is formed in the first dielectric layer. A conductive gate node extends along the buffer layer and electrically connects the portion of the gate electrode extending along the sidewall of the mesa. A gate pad is disposed on the first dielectric layer adjacent the mesa. A conductive gate connect strip is located over the gate node and is in contact therewith. The gate strip is in electrical contact with the gate pad. A source via is formed in the first dielectric layer and a source pad is formed in the source via. The conductive source interconnect has a second end in electrical contact with the source pad.
Public/Granted literature
- US20110316045A1 LAYOUT DESIGN FOR A HIGH POWER, GaN-BASED FET Public/Granted day:2011-12-29
Information query
IPC分类: