Invention Grant
- Patent Title: NAND-type nonvolatile semiconductor memory device
- Patent Title (中): NAND型非易失性半导体存储器件
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Application No.: US13182283Application Date: 2011-07-13
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Publication No.: US08319271B2Publication Date: 2012-11-27
- Inventor: Shoko Kikuchi , Yasushi Nakasaki , Koichi Muraoka
- Applicant: Shoko Kikuchi , Yasushi Nakasaki , Koichi Muraoka
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-087112 20080328
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
The present invention provides a high-performance MONOS-type NAND-type nonvolatile semiconductor memory device using an aluminum oxide film as a part of gate insulating film in a select transistor and as a block insulating film in a memory transistor. The NAND-type nonvolatile semiconductor memory device has, on a semiconductor substrate, a plurality of memory cell transistors connected to each other in series and a select transistor. The memory cell transistor includes a first insulating film on the semiconductor substrate, a charge trapping layer, a second insulating film made of aluminum oxide, a first control gate electrode, and a first source/drain region. The select transistor includes a third insulating film on the semiconductor substrate, a fourth insulating film made of an aluminum oxide containing at least one of a tetravalent cationic element, a pentavalent cationic element, and N (nitrogen), a second control gate electrode, and a second source/drain region.
Public/Granted literature
- US20110266612A1 NAND-TYPE NONVOLATILE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2011-11-03
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