Invention Grant
US08319945B2 Illumination system of a microlithographic projection exposure apparatus 有权
微光刻投影曝光装置的照明系统

Illumination system of a microlithographic projection exposure apparatus
Abstract:
A microlithographic projection exposure apparatus includes an illumination system and a projection objective. During use of the microlithographic projection exposure apparatus, the illumination system illuminates an object plane of the projection objective. The illumination system is configured so that light components in point-symmetrical relationship with each other, which are produced during use of the illumination system and which are only superposed in the object plane, have mutually orthogonal polarization states.
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