Invention Grant
- Patent Title: Illumination system of a microlithographic projection exposure apparatus
- Patent Title (中): 微光刻投影曝光装置的照明系统
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Application No.: US12779133Application Date: 2010-05-13
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Publication No.: US08319945B2Publication Date: 2012-11-27
- Inventor: Damian Fiolka , Vladan Blahnik
- Applicant: Damian Fiolka , Vladan Blahnik
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102007055063 20071116
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/54

Abstract:
A microlithographic projection exposure apparatus includes an illumination system and a projection objective. During use of the microlithographic projection exposure apparatus, the illumination system illuminates an object plane of the projection objective. The illumination system is configured so that light components in point-symmetrical relationship with each other, which are produced during use of the illumination system and which are only superposed in the object plane, have mutually orthogonal polarization states.
Public/Granted literature
- US20100231887A1 ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2010-09-16
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