Invention Grant
- Patent Title: Electret condenser
- Patent Title (中): 驻极体冷凝器
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Application No.: US12939748Application Date: 2010-11-04
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Publication No.: US08320589B2Publication Date: 2012-11-27
- Inventor: Tohru Yamaoka , Hiroshi Ogura , Yuichi Miyoshi
- Applicant: Tohru Yamaoka , Hiroshi Ogura , Yuichi Miyoshi
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2004-061987 20040305
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
An electret condenser includes a fixed film 110 including a conductive film 118 to be an upper electrode, a vibrating film 112 including a lower electrode 104 and a silicon oxide film 105 to be an electret film, and a silicon oxide film 108 provided between the fixed film 110 and the vibrating film 112 and including an air gap 109. Respective parts of the fixed film 110 and the vibrating film 112 exposed in the air gap 109 are formed of silicon nitride films 106 and 114.
Public/Granted literature
- US20110044480A1 ELECTRET CONDENSER Public/Granted day:2011-02-24
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