Invention Grant
- Patent Title: Apparatus for polishing semi-conductor dice
- Patent Title (中): 半导体骰子抛光装置
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Application No.: US12115140Application Date: 2008-05-05
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Publication No.: US08323078B2Publication Date: 2012-12-04
- Inventor: Christopher Leigh Marble
- Applicant: Christopher Leigh Marble
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agent Michael Gallardo; Nicholas J. Pauley; Jonathan T. Velasco
- Main IPC: B24B41/06
- IPC: B24B41/06

Abstract:
Hands free removal of layers of material simultaneously from a number of dies is accomplished by temporarily positioning a plurality of die holding devices into different segmented open areas of a template mounted over the grinding surface. In one embodiment, frictional force imparted to each holding device by the grinding wheel serves to position the holding device against a stop within the confines of each opening. The stop in each segment could be positioned at a different radial distance from the center of the grinding wheel in order to use different portions of the grinding wheel to grind each of the dies. In some embodiments, the segments are offset from each other around the template in order to increase the effective working area of the grinding surface.
Public/Granted literature
- US20090275271A1 Apparatus and Method for Polishing Semi-Conductor Dice Public/Granted day:2009-11-05
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