Invention Grant
US08323869B2 Positive resist composition and method of forming resist pattern
有权
正型抗蚀剂组合物和形成抗蚀剂图案的方法
- Patent Title: Positive resist composition and method of forming resist pattern
- Patent Title (中): 正型抗蚀剂组合物和形成抗蚀剂图案的方法
-
Application No.: US12721291Application Date: 2010-03-10
-
Publication No.: US08323869B2Publication Date: 2012-12-04
- Inventor: Hiroaki Shimizu , Hideto Nito , Junichi Tsuchiya , Takahiro Dazai
- Applicant: Hiroaki Shimizu , Hideto Nito , Junichi Tsuchiya , Takahiro Dazai
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2009-057167 20090310
- Main IPC: G03C1/00
- IPC: G03C1/00 ; G03F1/00 ; G03F7/00

Abstract:
A positive resist composition including a polymeric compound (A1) having a structural unit (a0) represented by general formula (a0-1) (R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R2 represents a divalent linking group, R3 represents a cyclic group containing —SO2— within the ring skeleton thereof) and a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group, an acid-generator component (B) and a fluorine-containing polymeric compound (F1) having a structural unit containing a base dissociable group.
Public/Granted literature
- US20100233626A1 POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2010-09-16
Information query