Invention Grant
- Patent Title: Method and photoresist with zipper mechanism
- Patent Title (中): 方法和光刻胶拉链机制
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Application No.: US12916759Application Date: 2010-11-01
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Publication No.: US08323870B2Publication Date: 2012-12-04
- Inventor: Fong-Cheng Lee , Ching-Yu Chang
- Applicant: Fong-Cheng Lee , Ching-Yu Chang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/40

Abstract:
The present disclosure provides a resist utilized in a photolithography patterning process. The resist includes a polymeric material having a plurality of zipper molecules, each including a first zipper portion and a second zipper portion, wherein the first and second zipper portions each include a plurality of zipper branches bonded together in pairs and cleavable to one of thermal energy, radiation energy, and chemical reaction.
Public/Granted literature
- US20120107742A1 METHOD AND PHOTORESIST WITH ZIPPER MECHANISM Public/Granted day:2012-05-03
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