Invention Grant
US08324010B2 Light pipe etch control for CMOS fabrication 有权
用于CMOS制造的光管蚀刻控制

Light pipe etch control for CMOS fabrication
Abstract:
In accordance with at least some embodiments of the present disclosure, a process for fabricating a light pipe (LP) is described. The process may be configured to construct a semiconductor structure having an etch-stop layer above a photodiode region and a first dielectric layer above the etch-stop layer. The process may be configured to etch a LP funnel through the first dielectric layer. And the process may be further configured to stop the etching of the LP funnel upon reaching and removing of the etch-stop layer.
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