Invention Grant
- Patent Title: Light pipe etch control for CMOS fabrication
- Patent Title (中): 用于CMOS制造的光管蚀刻控制
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Application No.: US12826655Application Date: 2010-06-29
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Publication No.: US08324010B2Publication Date: 2012-12-04
- Inventor: Kihong Kim
- Applicant: Kihong Kim
- Applicant Address: KY Grand Cayman
- Assignee: Himax Imaging, Inc.
- Current Assignee: Himax Imaging, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: SU IP Consulting
- Main IPC: H01L31/18
- IPC: H01L31/18

Abstract:
In accordance with at least some embodiments of the present disclosure, a process for fabricating a light pipe (LP) is described. The process may be configured to construct a semiconductor structure having an etch-stop layer above a photodiode region and a first dielectric layer above the etch-stop layer. The process may be configured to etch a LP funnel through the first dielectric layer. And the process may be further configured to stop the etching of the LP funnel upon reaching and removing of the etch-stop layer.
Public/Granted literature
- US20110316106A1 LIGHT PIPE ETCH CONTROL FOR CMOS FABRICATION Public/Granted day:2011-12-29
Information query
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