Invention Grant
US08324530B2 Method for heating a wafer by means of a light flux 有权
通过光通量加热晶片的方法

  • Patent Title: Method for heating a wafer by means of a light flux
  • Patent Title (中): 通过光通量加热晶片的方法
  • Application No.: US12680880
    Application Date: 2008-09-26
  • Publication No.: US08324530B2
    Publication Date: 2012-12-04
  • Inventor: Michel Bruel
  • Applicant: Michel Bruel
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: Winston & Strawn LLP
  • Priority: FR0757986 20071001
  • International Application: PCT/FR2008/051719 WO 20080926
  • International Announcement: WO2009/050381 WO 20090423
  • Main IPC: B23K26/00
  • IPC: B23K26/00
Method for heating a wafer by means of a light flux
Abstract:
A method for heating a wafer that has at least one layer to be heated and a sub-layer. The method includes applying at least one light flux pulse to the wafer for heating the at least one layer in a manner such that the absorption coefficient of the flux by the layer is low as long as the temperature of the layer to be heated is in the low temperature range (PBT) but the absorption coefficient increases significantly when the temperature of the layer enters a high temperature range (PHT). Also, a sub-layer is selected such that the absorption coefficient of the applied light flux at the selected wavelength is high in the low temperature range (PBT) and the temperature enters the high temperature range (PHT) when the sub-layer is subjected to the light flux. The application of the light flux achieves improved heating of the wafer.
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